JPH01167047U - - Google Patents
Info
- Publication number
- JPH01167047U JPH01167047U JP6413588U JP6413588U JPH01167047U JP H01167047 U JPH01167047 U JP H01167047U JP 6413588 U JP6413588 U JP 6413588U JP 6413588 U JP6413588 U JP 6413588U JP H01167047 U JPH01167047 U JP H01167047U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- jig
- backside
- positioning
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6413588U JPH01167047U (en]) | 1988-05-16 | 1988-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6413588U JPH01167047U (en]) | 1988-05-16 | 1988-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01167047U true JPH01167047U (en]) | 1989-11-22 |
Family
ID=31289616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6413588U Pending JPH01167047U (en]) | 1988-05-16 | 1988-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01167047U (en]) |
-
1988
- 1988-05-16 JP JP6413588U patent/JPH01167047U/ja active Pending
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